JEL Robot ServiceTeledyne

OG-5000

  • BRAND： Teledyne
  • DESCRIPTION： High concentration Ozone generator

  • Nation of Principal：U.S.A
    Product Application： 
    -Chemical Vapor Deposition CVD 
    -Atomic Layer Deposition ALD 
    -Oxide growth 
    -Surface conditioning 
    -Ashing 
    -Wet Processing 
    -Particle Cleaning
    Related Link：  http://teledyne.com/
    Keyword：    Ozone/O3

- High Purity Ozone
- Very High Ozone concentrations
- Environmentally friendlier than other process gases
- Low cost of ownership
- No consumables
- Compact and Modular
- Proven technology
- OG-5000-A Maximum Ozone Production 210g/hr
- OG-5000-B Maximum Ozone Production 150g/h