JEL Robot ServiceTeledyne

CAT-O3-E

  • BRAND： Teledyne
  • DESCRIPTION： Ozone destructor can destruct the Ozone to O2 and exhaust to the environment when process stopped

  • Nation of Principal：U.S.A
    Product Application    ：
    - CVD TEOS/Ozone
    - ALD
    - MOCVD
    Related Link： http://teledyne.com/
    Keyword：Ozone/O3

 - Catalyst-based ozone destruction
 - Rapid reaction time
 - Environmentally-safe byproducts
 - No consumables
 - No Maintenance
 - Simple installation
 - Capacity: 23% w/w or 350g/Nm³
 - Outlet Concentration: < 0.01ppm