DESCRIPTION： End point detection for chamber clean Process
Nation of Principal：U.S.A
Product Application：
- Pressure Range: 0.2 -1400 Torr
- Temperature Range: 4 – 45º C
- Response Time: < 2 seconds
- Analog Output Digital Interface: 0–1, 5, or 10 volt,
factory set RS-232-C and optional GUI interface
- Compact size
- No moving parts
- In-situ measurement
- Analog and digital outputs
- NDIR technology
- Real time graphical user interface
- Fast response time
