JEL Robot ServiceLayTec
1. In-situ monitoring during LED epitaxy run:
> emission and reflectance
> growth rate
> curvature
> wafer true temperature
2. Unique dual wavelength technology (950nm+633nm/405nm)
3. Optical fiber signal transmission
4. GaN、GaAs、InP
5. Modulized design
6. Powerful analysis software
7. Integrated with MOCVD and MBE