JEL Robot ServiceSENTECH

SI 500

  • BRAND： Sentech
  • DESCRIPTION： Inductively coupled plasma etching system

  • Nation of Principal：Germany
    Product Application    ：Including but not limited to III-V compound semiconductors (GaAs, InP, GaN, InSb), dielectrics, quartz, glass, silicon, silicon compounds (SiC, SiGe), and metals.
    Related Link：http://www.sentech.de/
    Keyword：etch




1.Low damage for nano structuring
2.Simple high rate etching
3.Inhouse ICP plasma source
4.Dynamic temperature control

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