JEL Robot ServiceSENTECH

SI 500 PPD

  • BRAND： Sentech
  • DESCRIPTION： Inductively coupled plasma etching system

  • Nation of Principal：Germany
    Product Application    ：SiO2, SINx, SiOxNy, and a-Si 
                                       in a temperature range of RT 
                                       to 350 °C
    Related Link：http://www.sentech.de/
    Keyword：    PECVD



1.PECVD with highly process flexibility on temperature & film
2.Vacuum loadlock with cleanliness of deposition processes
3.Available for the deposition of TEOS, SiC, and other materials with liquid or gaseous precursors
4.up to 200mm wafer

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