JEL Robot Servicen&k

OptiPrime-CD

  • BRAND： n&k
  • DESCRIPTION： Measuring the thicknesses, n index and k index, CD, depth and profiles of thin film

  • Nation of Principal：U.S.A
    Product Application    ：Measure the thichness, n index, k index, depth, CD and profile
    Related Link： http://www.nandk.com/
    Keyword：film thickness, OCD, n ,k measurement



1. The spectral range of this system is 190-1000nm
2. The measurement Spot Size is 50um
3. The system can be configured to handle 150mm, 200mm or 300mm wafer
4. The system provide non-destructive, real time measurement
5. The system provide high throughput measurements directly on the device