JEL Robot Servicen&k

5700-CDRT

  • BRAND： n&k
  • DESCRIPTION： Measuring the thicknesses, n index and k index, CD, depth and profiles of the thin film growth on the photomask

  • Nation of Principal：U.S.A
    Product Application    ：The automated system is designed for handling 5” or 6” square masks or up to 8” square samples and transparent wafers and can measure  thichness, n index, k index, depth, CD and profile.
    Related Link： http://www.nandk.com/
    Keyword：film thickness, OCD, n ,k measurement



1. The spectral range of this system is 190-1000nm
2. The reflectence measurement Spot Size is 50um and the transmittance measurement Spot Size is 400um
3. The automated system is designed for handling 5” or 6” square masks.
4. The system provide non-destructive, real time measurement
5. The system provide high throughput measurements directly on the device