JEL Robot ServiceSENTECH

SI 500 D

  • BRAND： Sentech
  • DESCRIPTION： ICP plasma deposition system

  • Nation of Principal：Germany
    Product Application    ：
    1. Exceptional high density plasma
    2. Planar ICP plasma source
    3. Outstanding properties of deposited layers
    4. Dynamic temperature control
    Related Link：http://www.sentech.de/
    Keyword：PECVD




It provides excellent performance for silane based deposition processes in Si and III-V semiconductor technology.

RelatedProduct

  • SI 500 PPD 1.PECVD with highly process flexibility on temperature & film 2.Vacuum loadlock with cleanline..