JEL Robot ServiceJEL 

SCR3160CSN

  • BRAND： JEL
  • DESCRIPTION： Clean Robot

  • Nation of Principal：JAPAN
    Use process：    Semiconductor
    Product name :3-Axis Cylindrical Coordinate Clean Robot
    Environment :     Clean room atmosphere
    Arm:     Single Arm
    Operating Range:    340mm (3rd joint center)
    Vertical Stroke:     200mm / 300mm / 400mm / 450mm / 500mm
    Payload Capacity :     3kgf (calculated for the arm 3rd joint)

1.New type of 3-axis cylindrical coordinate type single-arm clean robot
2.For handling wafers from 2 inch to 300mm with low-cost, high-speed handling, and no step-out error
3.High reliability: Closed-loop control achieves no step-out error under rapid load change or acceleration
4.Reduced origin search time: By absolute encoder
5.Equipped with the batteryless multi-rotation absolute sensor
6.Robot replacement is available: Compatible with conventional model (installation/performance)
7.High rigidity: Payload capacity of 3kgf (calculated for the arm 3rd joint/including wrist-block, end-effector, and wafer)
8.Arm lineup: 100mm, 130mm, 160mm, 200mm
9.Base or flange mounting type is able according to the customer’s system layout
10.Bernoulli end-effector is available (option)
11.Power: DC24V±10% 16A    Vacuum: -53kPa or more
12.Interface：RS232C and parallel photo I/O