JEL Robot ServiceSENTECH

SI ALD LL

  • BRAND： Sentech
  • DESCRIPTION： Atomic Layer Deposition with Loadlock

  • Nation of Principal：Germany
    Product Application    ：
    1. PEALD for sensitive substrates
    2. In situ diagnostics for process development and optimization
    3. Easy reactor cleaning
    4. Glove box system integration
    5. Cluster integration
    Related Link：http://www.sentech.de/
    Keyword：ALD




SENTECH atomic layer deposition systems enable thermal and plasma enhanced operation, which can be configured for oxide, nitride, and metal deposition.

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