Nation of Principal：Korea Product Application： wet etch、clean、stress relief、recilam process Related Link：http://www.apet.co.kr
1. Marangoni dry Effect 2. Corresponding warpage wafer (70um Thickness Thin Wafer 3. No water marker 4. No wafer breakage (dry method with surface tension of DIW) 5. No impact to metal layer 6. Less consumables(N2/IPA/Chemical filter) 7. High WPH
