• BRAND: Freiberg Instrument
  • DESCRIPTION: Measured the lifetime, resistanceand thickness of Si wafer, epi-layer, partially or fully processed wafer and compound semiconductor
  • Nation of Principal:Germany
    Product Application
    1. lifetime (mapping)

                                        2. Resistivity (linescan)

                                        3. thickness (linescan)

                                        4. Material: silicon wafer, epi
                                            layer, partially or fully
                                            processed wafer, compound

    Related Link

1. Inline mapping one wafer less than one second.
2. wafer classification based on lifetime data.
3. lifetime measurement at steady state (u-PCD also able)


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